Sensortechnics’s LBA series offers differential low pressure sensors based on thermal mass flow measurement of air through a micro-flow channel integrated within the silicon sensor chip. The sensors are ideal for differential pressure flow measurement where the pressure drop across a flow element is a measure of the volumetric flow rate.
For high performance medical respiratory devices it is essential to detect very small flows around the zero flow point while additionally being able to measure full scale flows of several hundreds of l/min. For these demanding requirements Sensortechnics now offers special versions of its LBA sensors with increased resolution of 0.01% in the lower pressure range and at the same time high dynamic ranges greater than 10,000.
The LBA sensors feature an innovative MEMS construction which integrates the micro-flow channel and fully analogue CMOS signal conditioning within the silicon sensor chip.